Vo, T., Dao, T., Cu, H. and Le, H. 2014. Fabrication of titanium nitride thin films by DC magnetron sputtering on different types of subtrates for coating applications. Science and Technology Development Journal. 17, 4 (Dec. 2014), 65-73. DOI:https://doi.org/https://doi.org/10.32508/stdj.v17i4.1557.