Giang, P., Le, H., Ngo, H., Le, H., & Huynh, D. (2009). STUDY OF ALUMINIUM OXIDE THIN FILM PREPARED BY RF MAGNETRON SPUTTERING. Science and Technology Development Journal, 12(3), 5-15. https://doi.org/https://doi.org/10.32508/stdj.v12i3.2214