Hong Phuc, Nguyen, Tran Tuan, Nguyen Huu Chi, and Phan Bach Thang. 2003. “DEPOSITION OF ZnO:Al FILMS BY UNBALANCED DC MAGNETRON SPUTTERING FROM CERAMIC TARGET”. VNUHCM Journal of Science and Technology Development 6 (3&4), 18-24. https://doi.org/https://doi.org/10.32508/stdj.v6i3&4.3313.