Giang, P., Le, H., Ngo, H., Le, H. and Huynh, D. (2009) “STUDY OF ALUMINIUM OXIDE THIN FILM PREPARED BY RF MAGNETRON SPUTTERING”, Science and Technology Development Journal, 12(3), pp. 5-15. doi: https://doi.org/10.32508/stdj.v12i3.2214.