Hong Phuc, N., T. Tuan, N. Huu Chi, and P. Bach Thang. “DEPOSITION OF ZnO:Al FILMS BY UNBALANCED DC MAGNETRON SPUTTERING FROM CERAMIC TARGET”. Science and Technology Development Journal, Vol. 6, no. 3&4, Apr. 2003, pp. 18-24, doi:https://doi.org/10.32508/stdj.v6i3&4.3313.