Tran, Le, Tran Van Phuong, Tran Tuan, and Nguyen Chi. “STUDYING AND PREPARING TiN FILMS BY D.C REACTIVE MAGNETRON SPUTTERING METHOD”. Science and Technology Development Journal 11, no. 10 (October 31, 2008): 51-60. Accessed November 23, 2024. http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/2701.