Phan TL, Pham DP, Phan BT, Tran CV. Preparation of high quality polycrystalline silicon thin films by aluminum induced crystallization. Science and Technology Development Journal [Internet]. 31Mar.2013 [cited 23Nov.2024];16(1):57-3. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/1419