Dang C, Bui T, Le H, Hoang V, Tran L, Truong L, Nguyen T. Study on the deposition of amorphous silicon and ito thin films for heterojunction solar cell application. Science and Technology Development Journal [Internet]. 31Mar.2013 [cited 3Apr.2025];16(1):101-1. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/1425