Pham P, Pham T, Tran T. Enhancement of electrical properties of Al-doped ZnO thin films (AZO) by hydrogene plasma treatment. VNUHCM Journal of Science and Technology Development [Internet]. 31Dec.2013 [cited 15May2025];16(4):5-2. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/1590