Tran L, Van Phuong T, Tuan T, Chi N. STUDYING AND PREPARING TiN FILMS BY D.C REACTIVE MAGNETRON SPUTTERING METHOD. Science and Technology Development Journal [Internet]. 31Oct.2008 [cited 23Nov.2024];11(10):51-0. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/2701