Phuc G, Tuan Hung L, Dat H, Den N. MODELING AND SIMULATION OF THE MAGNETRON SPUTTERING PROCESS FOR Al2O3 THIN FILM COATING. Science and Technology Development Journal [Internet]. 31Mar.2007 [cited 20May2024];10(3):12-9. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/2758