Van Ngoc L, Tuan T, Van Den N, Ai Phuong D, Thanh Dat H, Cao Vinh T, My Dung C. PREPARING TUNGSTEN OXIDE THIN FILM BY RF MAGNETRON SPUTTERING METHOD. Science and Technology Development Journal [Internet]. 31Jan.2005 [cited 23Nov.2024];8(1):29-3. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/2953