Hanh Thu V, Huu Chi N, Cong Truong D. APPLICATION OF DC MAGNETRON SPUTTERING FOR ZnO:Al/p-Si HETEROJUNCTION SOLAR CELLS. VNUHCM Journal of Science and Technology Development [Internet]. 30Jun.2005 [cited 24May2025];8(6):5-0. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/3001