Hong Phuc N, Tuan T, Van Hieu L, Bach Thang P. INVESTIGATING INFLUENCE OF THE SUBSTRATE TEMPERATURE ON STRUCTURE OF ZnO:AI FILMS PREPARED BY MAGNETRON SPUTTERING METHOD. Science and Technology Development Journal [Internet]. 29Feb.2004 [cited 29Apr.2024];7(2):13-6. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/3156