Hong Phuc N, Tuan T, Huu Chi N, Bach Thang P. DEPOSITION OF ZnO:Al FILMS BY UNBALANCED DC MAGNETRON SPUTTERING FROM CERAMIC TARGET. Science and Technology Development Journal [Internet]. 30Apr.2003 [cited 29Apr.2024];6(3&4):18-4. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/3313