Dinh H, Hoang D, Tran V. Deposition of high-electron-mobility transparent conducting zinc oxide thin films by DC magnetron sputtering in gas mixture of argon and hydrogen. Science and Technology Development Journal [Internet]. 30Aug.2015 [cited 28Apr.2024];18(3):162-9. Available from: http://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/832