Abstract

Studying the structure of TiO2-SiO2 composition thin films is very important because the crystallization behavior and their surface roughness Rms depend very much on their composition as well as annealing. Annealing composition thin film in a high temperature such as 600°C causes changing in their structures from amorphous to anatase and rutile structures. Because of an inhomogeneous in the TiO2-SiO2 composition structures, this changing can cause damage thin films. In this report, the changes of their structure were studied by Atomic Force Microscope AFM and X-ray diffraction. Furthermore, the crystallization behavior of films depending on the high temperature 600°C in 3h was also determined.