Open Access 
Downloads
Download data is not yet available.
Abstract
This work investigated the theory of negative ion radiation on ZnO and ZnO:Al target. Found that, negative ions Oxygen are generated from target surface due to surface ionization. Calculating result is nearly equal to experiment. Besides, this work also study the influences of high enegetic negative ion resputtering on electrical and optical properties of transparent conductive films ZnO:Al following different positions on substrate. As a result, located outside plasma edge, films have high resistivity and transmittance. Especially, film is set in perpenticularity to target, whose resistivity gets 5.1042.cm
Author's Affiliation
Article Details
Issue: Vol 7 No 2 (2004)
Page No.: 13-16
Published: Feb 29, 2004
Section: Article
DOI: https://doi.org/10.32508/stdj.v7i2.3156
Copyright Info
Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
How to Cite
Hong Phuc, N., Tuan, T., Van Hieu, L., & Bach Thang, P. (2004). INVESTIGATING INFLUENCE OF THE SUBSTRATE TEMPERATURE ON STRUCTURE OF ZnO:AI FILMS PREPARED BY MAGNETRON SPUTTERING METHOD. Science and Technology Development Journal, 7(2), 13-16. https://doi.org/https://doi.org/10.32508/stdj.v7i2.3156
Download Citation
Cited by
Article Statistics
HTML = 1045 times
Download PDF = 306 times
Total = 306 times
Download PDF = 306 times
Total = 306 times
Most read articles by the same author(s)
- Vu Thi Hanh Thu, Dinh Cong Truong, Nguyen Huu Chi, Le Van Hieu, Huynh Thanh Dat, Pham Kim Ngoc, Le Dinh Minh Tri, NITROGEN DOPED TITANIUM DIOXIDE FILMS MECHANISM PREPARED BY REACTIVE DC MAGNETRON , Science and Technology Development Journal: Vol 11 No 6 (2008)
- Le Van Ngoc, Le Quang Tri, Tran Tuan, Huynh Thanh Dat, Duong Ai Phuong, Nguyen Van Den, STUDYING ELECTROCHROMIC AND ELECTROCHEMISTRY CHARACTERISTICS OF WO3 THIN FILM , Science and Technology Development Journal: Vol 11 No 6 (2008)
- Vu Thi Hanh Thu, Nguyen Huu Chi, Le Van Hieu, Huynh Thanh Dat, Nguyen Quynh Giao, Pham Kim Ngoc, DEPENDENCE OF SPUTTERING CURRENT AND HEAT TREATMENT ON PHOTOCATALYTIC ACTIVITIES OF TiO2 THIN FILMS DEPOSITED BY UNBALANCED DC REACTIVE MAGNETRON SPUTTERING , Science and Technology Development Journal: Vol 11 No 10 (2008)
- Le Tran, Tran Van Phuong, Tran Tuan, Nguyen Huu Chi, STUDYING AND PREPARING TiN FILMS BY D.C REACTIVE MAGNETRON SPUTTERING METHOD , Science and Technology Development Journal: Vol 11 No 10 (2008)
- Dinh Thi Mong Cam, Nguyen Huu Chi, Le Khac Binh, Tran Tuan, Nguyen Thi Hai Yen, Tran Quang Trung, SYNTHESIS OF CrN HARD COATINGS BY SPUTTER ION PLATING , Science and Technology Development Journal: Vol 10 No 5 (2007)
