Abstract

This paper demonstrates the possibility of developing a low-presure planar magnetron discharge. The space charge in this region as the negative state. Theoretical caculation show that, the discharge intensity Ia/p  V_a^2 /B2 and discharge can be sustained at hight - vacuum . Such results have been experimetally verified. This magnetron was confirmed in this work to be a true low-temperature coating process quite suitable for plastics and other temperature sensitive substrates.