Tran, L., Van Phuong, T., Tuan, T., & Chi, N. (2008). STUDYING AND PREPARING TiN FILMS BY D.C REACTIVE MAGNETRON SPUTTERING METHOD. VNUHCM Journal of Science and Technology Development, 11(10), 51-60. https://doi.org/https://doi.org/10.32508/stdj.v11i10.2701