Tran, Le, Tran Van Phuong, Tran Tuan, and Nguyen Chi. 2008. “STUDYING AND PREPARING TiN FILMS BY D.C REACTIVE MAGNETRON SPUTTERING METHOD”. VNUHCM Journal of Science and Technology Development 11 (10), 51-60. https://doi.org/https://doi.org/10.32508/stdj.v11i10.2701.