Phuc, G., L. Tuan Hung, H. Dat, and N. Den. “MODELING AND SIMULATION OF THE MAGNETRON SPUTTERING PROCESS FOR Al2O3 THIN FILM COATING”. VNUHCM Journal of Science and Technology Development, Vol. 10, no. 3, Mar. 2007, pp. 12-19, doi:https://doi.org/10.32508/stdj.v10i3.2758.