Le N, Pham H, Hoang T, Tran T, Huynh D. SUBSTRATE TEMPERATURE EFFECTS ON STRUCTURE AND ELECTRICAL CHARACTERISTICS OF TCO THIN FILM SnO2: Sb PREPARED BY REACTIVE MAGNETRON SPUTTERING. Science and Technology Development Journal [Internet]. 15Nov.2009 [cited 3Jul.2024];12(17):16-1. Available from: https://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/2362