Van Ngoc L, Tuan T, Van Den N, Ai Phuong D, Thanh Dat H, Cao Vinh T, My Dung C. PREPARING TUNGSTEN OXIDE THIN FILM BY RF MAGNETRON SPUTTERING METHOD. VNUHCM Journal of Science and Technology Development [Internet]. 31Jan.2005 [cited 31Aug.2025];8(1):29-3. Available from: https://stdj.scienceandtechnology.com.vn/index.php/stdj/article/view/2953