View of Deposition of high-electron-mobility transparent conducting zinc oxide thin films by DC magnetron sputtering in gas mixture of argon and hydrogen

VNUHCM Journal of

Science and Technology Development

An official journal of Viet Nam National University Ho Chi Minh City, Viet Nam since 1997

ISSN 1859-0128

Return to Article Details Deposition of high-electron-mobility transparent conducting zinc oxide thin films by DC magnetron sputtering in gas mixture of argon and hydrogen Download Download PDF