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VNUHCM Journal of

Science and Technology Development

An official journal of Viet Nam National University Ho Chi Minh City, Viet Nam since 1997

ISSN: 1859-0128
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IMPROVING THE PROCCESS OF MANUFACTURING ZnO:AI THIN FILMS

Le Van Hieu 1
Dao Vinh Ai 1
Ho Van Binh 1
Nguyen Huu Chi 1
Tran Tuan 1

Volume & Issue: Vol. 8 No. 3 (2005) | Page No.: 29-34 | DOI: 10.32508/stdj.v8i3.2979
Published: 2005-03-31

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Copyright © 2005 by the author(s).

Copyright The Author(s) 2023. This article is published with open access by Vietnam National University, Ho Chi Minh city, Vietnam. This article is distributed under the terms of the Creative Commons Attribution License (CC-BY 4.0) which permits any use, distribution, and reproduction in any medium, provided the original author(s) and the source are credited. 

Abstract

This work studied and manufactured ZnO:Al thinfilms with the dimention (50x100)cm2. The average transmisstion coefficient in the visible range (350-800nm) is greater than 85% and the reflection coefficient in the infrared range is greater than 80%, the moveability about 13(cm-/Vs) and the concentration of charged particles about 6,12.10(cm).

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