DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY

Tan Duc Tran

doi:10.32508/stdj.v13i2.2111

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Abstract

Nowadays, the Micro Electro Mechanical System (MEMS) technology’ has been achieved great developments. Accelerometer is one kind of the most popular MEMS sensors due to it's widely applications. In order to fabricate any MEMS device, the design and simulation have been considered seriously. This paper presents a new design of the three degrees of freedom piezoresistive accelerometer to improve the sensitivity, urgent demand from the reality. The ANSYS software was utilized to design, simulate and evaluate the advantages of this new structure compared to other sensors fabricated previously.

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Tan Duc Tran

Hanoi University of Engineering and Technology
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Article Details

Issue: Vol 13 No 2 (2010)

Page No.: 57-65

Published: Jun 30, 2010

Section: Engineering and Technology - Research article

DOI: https://doi.org/10.32508/stdj.v13i2.2111

Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

How to Cite

Tran, T. (2010). DEVELOPMENT OF A NEW STRUCTURE OF 3-DOF PIEZORESISTIVE ACCELEROMETER TO ENHANCE THE SENSITIVITY. Science and Technology Development Journal, 13(2), 57-65. https://doi.org/https://doi.org/10.32508/stdj.v13i2.2111