Open Access 
Downloads
Abstract
Titanium dioxide thin films that were deposited by unbalanced DC reactive magnetron sputtering on glass substrates have a high crystal structure and large surfac especially getting the anatase phase at the fairly low temperature substrates T, = 446K . The films were charaterized by X-ray diffraction, attomic force AFM, UV-vis spectroscopy. The photocatalytic properties of TiO2 thin films were tested with the degradation methylene blue MB under UV light irradiation. The best fabricated photocatalytic TiOthin films were found with such parameters: gas ratio 0 Ar = 0,06; sputtering power P, = 275W (1p = 0,5 A; Vp = 550V); target - substrate distance h = 4cm; pressure p = 13 mtorr, film thickness d = 660 nm and substrate temperature Tg = 485 K. These films also have a reused probability several times without decreasing amount of Methylene Blue (MB) degradation.
Issue: Vol 12 No 3 (2009)
Page No.: 16-23
Published: Feb 15, 2009
Section: Article
DOI: https://doi.org/10.32508/stdj.v12i3.2226
Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
Download PDF = 582 times
Total = 582 times
Most read articles by the same author(s)
- Phuc Van Giang, Hung Vu Tuan Le, Hoa Thi Kim Ngo, Hieu Van Le, Dat Thanh Huynh, STUDY OF ALUMINIUM OXIDE THIN FILM PREPARED BY RF MAGNETRON SPUTTERING , Science and Technology Development Journal: Vol 12 No 3 (2009)
- Thu Thi Hanh Vu, Chi Huu Nguyen, Hieu Van Le, Dat Thanh Huynh, Ngoc Kim Phan, PHOTOCATALYTIC TIO THIN FILMS FABRICATED BY DC REACTIVE MAGNETRON SPUTTERING , Science and Technology Development Journal: Vol 16 No 3 (2013)
- Tran Le, Nhuan Duy Nguyen, Cuong Hung Ngo, Chi Huu Nguyen, Tuan Tran, PHOTO-CATALYTIC TRANSPARENT HEAT MIRROR FILM TiO2/TiN/TiO2 , Science and Technology Development Journal: Vol 12 No 3 (2009)
- Ngoc Van Le, Vinh Cao Tran, Tuan Tran, Dat Thanh Huynh, Phuong Ai Duong, Toai Quang Le, Hoa Van Bach, HETEROEPITAXIAL GROWTH OF WO3 FILMS ON ITO(400) SURFACES AND THE EFFECT OF THICKNESS OF ITO LAYER, COATED ON GLASS SUBSTRATES ON GROWTH ORIENTATION OF WO3 LATTICE , Science and Technology Development Journal: Vol 12 No 12 (2009)
- Binh Van Ho, Hung Vu Tuan Le, Nhien Thi Ngoc Nguyen, Dat Thanh Huynh, Phuong Ai Duong, Hieu Van Le, STUDYING THE TRANSPARENT AND ELECTRICAL PROPERTIES OF ZnO:Ti THIN FILM WHICH IS PREPARED BY DC MAGNETRON SPUTTERINGSPUTTERING , Science and Technology Development Journal: Vol 12 No 12 (2009)
- Ngoc Van Le, Hien Ngoc Pham, Trang Le Thanh Hoang, Tuan Tran, Dat Thanh Huynh, SUBSTRATE TEMPERATURE EFFECTS ON STRUCTURE AND ELECTRICAL CHARACTERISTICS OF TCO THIN FILM SnO2: Sb PREPARED BY REACTIVE MAGNETRON SPUTTERING , Science and Technology Development Journal: Vol 12 No 17 (2009)
