HETEROEPITAXIAL GROWTH OF WO3 FILMS ON ITO(400) SURFACES AND THE EFFECT OF THICKNESS OF ITO LAYER, COATED ON GLASS SUBSTRATES ON GROWTH ORIENTATION OF WO3 LATTICE
- University of Science, VNU-HCM
- VNU-HCM
- Voronezh State University, Russia
- Go Vap High School, Ho Chi Minh city
Published:
2009-06-28
Abstract
WO3 films were deposited by rf magnetron sputtering method onto ITO(400)-coated glass substrates. Experiments showed that the growth orientation of WO3 crystalline lattice depends on the thickness of ITO layer. In this paper, this dependence will be discussed further.