Open Access 
Downloads
Download data is not yet available.
Abstract
Studying the structure of TiO2-SiO2 composition thin films is very important because the crystallization behavior and their surface roughness Rms depend very much on their composition as well as annealing. Annealing composition thin film in a high temperature such as 600°C causes changing in their structures from amorphous to anatase and rutile structures. Because of an inhomogeneous in the TiO2-SiO2 composition structures, this changing can cause damaging thin films. In this report, their crystallization was studied by Atomic Force Microscope AFM and X-ray diffraction. Furthermore, the crystallization behavior of films depending on the high temperature 600°C in 3h was also determined.
Author's Affiliation
Article Details
Issue: Vol 9 No 4 (2006)
Page No.: 24-30
Published: Apr 30, 2006
Section: Article
DOI: https://doi.org/10.32508/stdj.v9i4.2897
Copyright Info
Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
How to Cite
Tuan Hung, L., Thanh Dat, H., Van Den, N., & Kieu Hanh, T. (2006). DETERMINING THE CRYSTALLIZATION BEHAVIOR OF TiO2-SiO2 MIXED COMPOSITION FILMS. Science and Technology Development Journal, 9(4), 24-30. https://doi.org/https://doi.org/10.32508/stdj.v9i4.2897
Download Citation
Cited by
Article Statistics
HTML = 712 times
Download PDF = 243 times
Total = 243 times
Download PDF = 243 times
Total = 243 times
Most read articles by the same author(s)
- Le Van Ngoc, Le Quang Tri, Tran Tuan, Huynh Thanh Dat, Duong Ai Phuong, Nguyen Van Den, STUDYING ELECTROCHROMIC AND ELECTROCHEMISTRY CHARACTERISTICS OF WO3 THIN FILM , Science and Technology Development Journal: Vol 11 No 6 (2008)
- Le Vu Tuan Hung, Ho Van Binh, Giang Van Phuc, Duong Ai Phuong, Le Son Hai, Huynh Thanh Dat, SIMULATION ANTI−REFLECTION (AR) THIN FILM FROM GLANCING ANGLE DEPOSITION BY GENETIC ALGORITHMS , Science and Technology Development Journal: Vol 11 No 10 (2008)
- Vu Thi Hanh Thu, Nguyen Huu Chi, Le Van Hieu, Huynh Thanh Dat, Nguyen Quynh Giao, Pham Kim Ngoc, DEPENDENCE OF SPUTTERING CURRENT AND HEAT TREATMENT ON PHOTOCATALYTIC ACTIVITIES OF TiO2 THIN FILMS DEPOSITED BY UNBALANCED DC REACTIVE MAGNETRON SPUTTERING , Science and Technology Development Journal: Vol 11 No 10 (2008)
- Giang Van Phuc, Le Vu Tuan Hung, Huynh Thanh Dat, Nguyen Van Den, MODELING AND SIMULATION OF THE MAGNETRON SPUTTERING PROCESS FOR Al2O3 THIN FILM COATING , Science and Technology Development Journal: Vol 10 No 3 (2007)
- Le Vu Tuan Hung, Nguyen Van Den, Huynh Thanh Dat, Ta Thi Kieu Hanh, DETERMINING THE CRYSTALLIZATION BEHAVIOR OF TiO2-SiO2 MIXED COMPOSITION FILMS , Science and Technology Development Journal: Vol 9 No 1 (2006)
- Le Vu Tuan Hung, Nguyen Van Den, Huynh Thanh Dat, STUDY OF TITANIUM DIOXIDE THIN FILMS PREPARED BY RF MAGNETRON SPUTTERING , Science and Technology Development Journal: Vol 9 No 6 (2006)
- Le Vu Tuan Hung, Nguyen Van Den, Huynh Thanh Dat, STUDYING OPTIMAL PARAMETERS OF TiO2 AND SiO2 THIN FILMS TO PREPARE FOR ANTI-REFLECTION COATING , Science and Technology Development Journal: Vol 9 No 9 (2006)
- Nguyen Van Den, STUDYING THE COATED PAPER USING THE METHOD OF HATR , Science and Technology Development Journal: Vol 5 No 7&8 (2002)
- Huynh Thanh Dat, THE STUDY OF INORGANIC MATERIALS USING DIFFUSE REFLECTANCE , Science and Technology Development Journal: Vol 5 No 12 (2002)
- Nguyen Thi Thu Thuy, Duong Ai Phuong, Nguyen Van Den, R.K. Mamedov, V.I. Zolatarov, STUDYING FILM OF POLYMER, PAPER AND OPTICAL FIBER BY METHOD ATTENUATED TOTAL REFLECTION , Science and Technology Development Journal: Vol 3 No 1 (2000)
