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Abstract

WO3 thin films are prepared on glass substrates by rf magnetron sputtering method from WO3 ceramic target. Optical properties and crystalline Structure of films are investigated by transmittance spectra and X Ray diffraction spectra.

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Article Details

Issue: Vol 8 No 1 (2005)
Page No.: 29-33
Published: Jan 31, 2005
Section: Article
DOI: https://doi.org/10.32508/stdj.v8i1.2953

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Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

 How to Cite
Van Ngoc, L., Tuan, T., Van Den, N., Ai Phuong, D., Thanh Dat, H., Cao Vinh, T., & My Dung, C. (2005). PREPARING TUNGSTEN OXIDE THIN FILM BY RF MAGNETRON SPUTTERING METHOD. VNUHCM Journal of Science and Technology Development, 8(1), 29-33. https://doi.org/https://doi.org/10.32508/stdj.v8i1.2953


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