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Abstract
To overcome the limit of number of available materials with suitable refractive index for optical thin films, we studied (TiO2)x – (SiO2)1-x composite thin films by rf sputtering. In this research, we fabricuted TiO2 and (TiO2)x – (SiO2)1-x composite target from powder then fabricated thin films by rf sputtering method. Optical properties of thin films – refractive index, optical energy band gap Eg were determined as a function of composition ratio x/(1-x).
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Article Details
Issue: Vol 8 No 3 (2005)
Page No.: 16-22
Published: Mar 31, 2005
Section: Article
DOI: https://doi.org/10.32508/stdj.v8i3.2977
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Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
How to Cite
Tuan Hung, L., Den, N., Thanh Dat, H., & My Dung, C. (2005). OPTICAL PROPERTIES OF (TiO2)x – (SiO2)1-x COMPOSITE THIN FILMS BY RF SPUTTERING. Science and Technology Development Journal, 8(3), 16-22. https://doi.org/https://doi.org/10.32508/stdj.v8i3.2977
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