Abstract

In this paper, we focused on modeling the structure of the capacitive accelerometer by using SUGAR in MATLAB environment. SUGAR is such a powerful and flexible language that MEMS designer can get the equivalent results to classical methods (FEM, BEM). The accelerometers having the vertical structure with four diagonai spring beams were designed and simulated. In other way, we built a closed-loop system which can be applied for this structure. The system used sigma-delta modulation method because of its noise shaping properties and its direct digital output signal.