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Abstract

The purpose of this work is to study influence of the substrate temperature on the structure of ZnO:Al thin films which were deposited by magnetron sputtering method with unbalance magnetic from the ceramic targets.



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Issue: Vol 7 No 2 (2004)
Page No.: 5-12
Published: Feb 29, 2004
Section: Article
DOI: https://doi.org/10.32508/stdj.v7i2.3155

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Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

 How to Cite
Quang, U. (2004). ON THE EXISTENCE OF OPERATIONAL PROBABILITY MEASURE. Science and Technology Development Journal, 7(2), 5-12. https://doi.org/https://doi.org/10.32508/stdj.v7i2.3155

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