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Abstract
The purpose of this work is to study influence of the substrate temperature on the structure of ZnO:Al thin films which were deposited by magnetron sputtering method with unbalance magnetic from the ceramic targets.
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Article Details
Issue: Vol 7 No 2 (2004)
Page No.: 5-12
Published: Feb 29, 2004
Section: Article
DOI: https://doi.org/10.32508/stdj.v7i2.3155
How to Cite
Quang, U. (2004). ON THE EXISTENCE OF OPERATIONAL PROBABILITY MEASURE. Science and Technology Development Journal, 7(2), 5-12. https://doi.org/https://doi.org/10.32508/stdj.v7i2.3155
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