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VNUHCM Journal of

Science and Technology Development

An official journal of Viet Nam National University Ho Chi Minh City, Viet Nam since 1997

ISSN: 1859-0128
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OPTICAL PROPERTIES OF (TiO2)x – (SiO2)1-x COMPOSITE THIN FILMS BY RF SPUTTERING

Le Vu Tuan Hung 1
Nguyen Van Den 1
Huynh Thanh Dat 1
Cao Thi My Dung 1

Volume & Issue: Vol. 8 No. 3 (2005) | Page No.: 16-22 | DOI: 10.32508/stdj.v8i3.2977
Published: 2005-03-31

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Copyright © 2005 by the author(s).

Copyright The Author(s) 2023. This article is published with open access by Vietnam National University, Ho Chi Minh city, Vietnam. This article is distributed under the terms of the Creative Commons Attribution License (CC-BY 4.0) which permits any use, distribution, and reproduction in any medium, provided the original author(s) and the source are credited. 

Abstract

To overcome the limit of number of available materials with suitable refractive index for optical thin films, we studied (TiO2)x – (SiO2)1-x composite thin films by rf sputtering. In this research, we fabricuted TiO2 and (TiO2)x – (SiO2)1-x composite target from powder then fabricated thin films by rf sputtering method. Optical properties of thin films – refractive index, optical energy band gap Eg were determined as a function of composition ratio x/(1-x).

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