Abstract

Micro linear actuators are applied to many precision fields such as ultraprecise positioning, precision manufacturing, optics, etc. The conceptual design of a microlinear actuator is presented in this paper. The concept is based on a stacked piezo and a flexure-based differential amplifier mechanism. The paper also presents the simulation of the designed actuator using ANSYS. The simulation is performed by combining two problems contact problem and a strain-electricity coupling