Open Access

Downloads

Download data is not yet available.

Abstract

In the heterojunction with intrinsic thin-layer (HIT) solar cell structure studied in this work, an intrinsic amorphous silicon (a-Si) layer followed by a n-type amorphous silicon was deposited on a p-type Czochralski (CZ) monocrystalline silicon (c-Si) wafer by plasma enhanced chemical vapor deposition (PECVD) method to form an heterojunction device. Then, indium tin oxide (ITO) layer was formed by DC magnetron sputtering as the top electrode and the anti-reflection coating layer. In order to obtain the high efficiency heterojunction structure, two important aspects were focused: improving the passivation properties of a-Si/c-Si heterojunction and reducing the light absorption and the sheet resistance of ITO layers. It was found that hydrogenated amorphous silicon (a- Si:H) layers can be grown at low substrate temperature, about 200°C. High-quality ITO layers with the sheet resistance less than 15 ohm/sq and the transmittance of about 70%, can be deposited at relatively low DC power (50W).



Author's Affiliation
Article Details

Issue: Vol 16 No 1 (2013)
Page No.: 101-111
Published: Mar 31, 2013
Section: Engineering and Technology - Research article
DOI: https://doi.org/10.32508/stdj.v16i1.1425

 Copyright Info

Creative Commons License

Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.

 How to Cite
Dang, C., Bui, T., Le, H., Hoang, V., Tran, L., Truong, L., & Nguyen, T. (2013). Study on the deposition of amorphous silicon and ito thin films for heterojunction solar cell application. Science and Technology Development Journal, 16(1), 101-111. https://doi.org/https://doi.org/10.32508/stdj.v16i1.1425

 Cited by



Article level Metrics by Paperbuzz/Impactstory
Article level Metrics by Altmetrics

 Article Statistics
HTML = 903 times
Download PDF   = 550 times
Total   = 550 times