Abstract

Research and develop method and automatic tools to analyze defect of electronic wafer has become increasingly important when size and density of wafer become large. In this paper, we describe a method of using Fuzzy k-NN together with Fuzzy Logic to in-line cluster, analyze and inspect errors of low-résolution wafermap. We also describe basic characteristics of wafermap and fuzzy logic functions which are applied in the program to analyze and recognize defect objects. We use defect data in digital form generated directly during progress of producing semi-conductor.