Simulating the operation of 10 MHz quartz crystal microbalance under the effection of fluid used couple field method
- IC Design Research and Education Center, VNU–HCM
- Research & Development Center, Saigon Hitech-Park – HCM City
Abstract
This article presents the simulation of operation of 10 MHz resonance frequency quartz crystal microblance device QCM in case of fluid domain (blood, water, high viscosity fluid …). Because QCM device operates in piezoelectric substrate, simulation has to use the structure-electric couple field element (SOLID 226). Determination of behaviors of device in the case of fluid domain is important for applications. Couple field method (structure-fluid) including finite element method and computational fluid dynamic method was used to determine output signals. The loading quantitative method on surface’s devices was built for the applications in biological and chemical sensors.