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STUDYING THE TRANSPARENT AND ELECTRICAL PROPERTIES OF ZnO:Ti THIN FILM WHICH IS PREPARED BY DC MAGNETRON SPUTTERINGSPUTTERING

Binh Van Ho 1, *
Hung Vu Tuan Le 1
Nhien Thi Ngoc Nguyen 1
Dat Thanh Huynh 2
Phuong Ai Duong 1
Hieu Van Le 1
  1. University of Science, VNU-HCM
  2. VNU-HCM
Correspondence to: Binh Van Ho, University of Science, VNU-HCM. Email: pvphuc@hcmuns.edu.vn.
Volume & Issue: Vol. 12 No. 12 (2009) | Page No.: 59-64 | DOI: 10.32508/stdj.v12i12.2320
Published: 2009-06-28

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Copyright The Author(s) 2023. This article is published with open access by Vietnam National University, Ho Chi Minh city, Vietnam. This article is distributed under the terms of the Creative Commons Attribution License (CC-BY 4.0) which permits any use, distribution, and reproduction in any medium, provided the original author(s) and the source are credited. 

Abstract

The Ti-doped Zno films were deposited onto glass substrates from ceramic targets ZnO with various Ti concentrations using a DC magnetron sputtering. The experimental results show that all thin films are transparent and conductive oxide films, with the appropriate Ti concentration (⁓1.5% Ti), the conductance of films can be improved. Optical characteristics of thin films was determined by UV-V is spectroscopy. The thickness of thin films was measured by Stylus method. The electrical resistivity was measured by four-point probe, and the roughness of films was determined by AFM.

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