Open Access 
Downloads
Download data is not yet available.
Abstract
Transparent conducting Gallium-doped Zinc oxide thin films were prepared by rf magnetron sputtering using ceramic oxide target made from the mixture of Ga2O3 (99.99%) – ZnO (99.5%) powders pressed at 1400kg/cm2 and sintered at 1500 ℃. The obtained thin films have the optical transmission of 85% on average in the wavelength range of 400 to 700 nm and the resistivity of 4 -5 x 10-4 Ω.cm. The films have a high texture and grow only along the c axis (002 plane) of the hexagonal structure.
Author's Affiliation
Article Details
Issue: Vol 8 No 3 (2005)
Page No.: 5-10
Published: Mar 31, 2005
Section: Article
DOI: https://doi.org/10.32508/stdj.v8i3.2975
Copyright Info
Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
How to Cite
Vinh, T., Huu Chi, N., Van Den, N., My Dung, C., & Quang Long, D. (2005). FORMING Ga - DOPED ZNO BY RF MAGNETRON SPUTTERING. Science and Technology Development Journal, 8(3), 5-10. https://doi.org/https://doi.org/10.32508/stdj.v8i3.2975
Download Citation
Cited by
Article Statistics
HTML = 679 times
Download PDF = 238 times
Total = 238 times
Download PDF = 238 times
Total = 238 times
Most read articles by the same author(s)
- Le Vu Tuan Hung, Nguyen Van Den, Huynh Thanh Dat, Cao Thi My Dung, OPTICAL PROPERTIES OF (TiO2)x – (SiO2)1-x COMPOSITE THIN FILMS BY RF SPUTTERING , Science and Technology Development Journal: Vol 8 No 3 (2005)
- Tran Cao Vinh, Nguyen Huu Chi, Cao Thi My Dung, Dinh Thi Mong Cam, DEPOSITION OF ITO THIN FILM ON GLASS WITH ZnO BUFFER , Science and Technology Development Journal: Vol 8 No 4 (2005)
- Le Van Hieu, Dao Vinh Ai, Nguyen Huu Chi, Tran Tuan, MAKING THE SOLAR WATER DISTILLATION WITH ZnO:AI THIN FILMS , Science and Technology Development Journal: Vol 8 No 4 (2005)
