Open Access 
Downloads
Download data is not yet available.
Abstract
ZnO:In thin films was deposited on glass substrate by magnetron DC sputtering method from ceramic target. The ZnO:In ceramic targets have concentrations of In2O3 varying between 1 and 4wt%. The ZnO:In film has the resistivity with value of 1.79 x 10-3 Ωcm, at a layer thickness of about 1μm, corresponding with ZnO:In target (2%wt In2O3), at the substrate temperature of about 240- 0C. All ZnO:In thin films have the transparence above 85% in the visible spectra.
Author's Affiliation
Article Details
Issue: Vol 14 No 1 (2011)
Page No.: 72-77
Published: Mar 30, 2011
Section: Natural Sciences - Research article
DOI: https://doi.org/10.32508/stdj.v14i1.1886
Copyright Info
Copyright: The Authors. This is an open access article distributed under the terms of the Creative Commons Attribution License CC-BY 4.0., which permits unrestricted use, distribution, and reproduction in any medium, provided the original author and source are credited.
How to Cite
Ho, B., Le, H., Le, Q., Pham, T., Duong, P., & Le, H. (2011). TRANSPARENT CONDUCTING ZnO:In THIN FILMS PREPARED BY MAGNETRON DC SPUTTERING METHOD. Science and Technology Development Journal, 14(1), 72-77. https://doi.org/https://doi.org/10.32508/stdj.v14i1.1886
Download Citation
Cited by
Article Statistics
HTML = 1912 times
Download PDF = 572 times
Total = 572 times
Download PDF = 572 times
Total = 572 times
Most read articles by the same author(s)
- Ngoc Kim Pham, Hieu Van Le, Vinh Cao Tran, Toan Thanh Dao, Fabricating and investigating properties of memristors on flexible substrate (PET) , Science and Technology Development Journal: Vol 19 No 2 (2016)
- Tien Huu Cao, Thien Quang Nguyen, Linh Van Ha, Hieu Van Le, Study on the adsorption and desorption process of thiol-modified probe on gold electrodes using cyclic voltammetric method , Science and Technology Development Journal: Vol 18 No 1 (2015)
- Phuc Huu Dang, Duan Van Nguyen, Vu Si Hoai Nguyen, Hieu Van Le, Tran Le, Studying and fabricating p - type transparent conducting antimony - doped SnO2 thin films by magnetron sputtering , Science and Technology Development Journal: Vol 18 No 1 (2015)
- Luan Nguyen Thanh Huynh, Cuong Chi Huynh, Nhan Thuc Chi Ha, Vinh Quang Lam, Hieu Van Le, Synthesis and study on mechanical properties of the polypropylene/TiO2 - nano Ag composite for antibacterial application , Science and Technology Development Journal: Vol 18 No 1 (2015)
- Son Hoang Cao Tran, Quoc Kien Quoc, Nhan Thuc Chi Ha, Top Khac Le, Thang Bach Phan, Vinh Quang Lam, Tuan Tran, Hieu Van Le, Elaboration of Conductive Polymer thin films (P3HT/PCBM) by spin coating method – Application for hybrid organic solar cell , Science and Technology Development Journal: Vol 17 No 3 (2014)
- Top Khac Le, Son Hoang Cao Tran, Nhan Thuc Chi Ha, Thang Bach Phan, Hieu Van Le, Dinh Nang Nguyen, Influence of anneal time and ZnO nanorod on the efficiency of organicinorganic hybrid solar cell , Science and Technology Development Journal: Vol 17 No 3 (2014)
- Lam Thi Ngoc Tran, Hieu Van Le, Vinh Cao Tran, Van Thi Thanh Tran, Influence of SnO2 concentration on the structure and optical properties of Erbium doped SiO2-SnO2 ceramic glass thinfilms , Science and Technology Development Journal: Vol 17 No 3 (2014)
- Tien Huu Cao, Thien Quang Nguyen, Linh Van Ha, Hieu Van Le, Hung Van Manh Le, Optimal probe concentration for the hybridization in the basedelectrochemical biosensor gold nanowire , Science and Technology Development Journal: Vol 17 No 4 (2014)
- Thuong Tran Tuyet Vo, Tuan Anh Dao, Hang Thi Thu Cu, Hung Vu Tuan Le, Fabrication of titanium nitride thin films by DC magnetron sputtering on different types of subtrates for coating applications , Science and Technology Development Journal: Vol 17 No 4 (2014)
- Hoa Phuoc Trung Nguyen, Tuyen Thuy Bich Pham, Vinh Quang Lam, Hieu Van Le, Synthesis of silver nano-particles using micro-emulsion technique , Science and Technology Development Journal: Vol 16 No 4 (2013)
